SILICON WAFER
- 6”(150mm) / 8”(200mm) / 12”(300mm) : Prime / Test / Reclaim / Dummy / Coinroll wafer
(Supply according to the customer’s requested specifications)
EPI WAFER (Epitaxial wafer)
- 6”(150mm) / 8”(200mm)
(Supply according to the customer’s requested specifications)
SOI WAFER(Silicon On Insulator wafer)
- 6”(150mm) / 8”(200mm) / 12”(300mm) : BSOI / M-SOI / S-SOI / C-SOI / Epi-SOI
(Supply according to the customer’s requested specifications)
(BSOI : Bonded SOI / M-SOI : Multi-layer SOI / S-SOI : Separated SOI / C-SOI : Cavity SOI / Epi-SOI : Epitaxial SOI)
FILM WAFER(Deposition wafer)
- 8”(200mm) / 12”(300mm) : Thermmal / CVD / PVD etc.
(Supply according to the customer’s requested specifications)
(Type : Oxide, AL, AL-CU, SiN, Ti, TiN, Cu, W, Ta, TaN, TEOS, A-Si, Poly-Si, Nitridation, etc.)
